Brooks Instrument Vacuum Gauges
High-Performance Vacuum Measurement.
From capacitance manometers offering exceptional accuracy and resistance to contamination, to Pirani-based and multi-sensor solutions enabling ultra-wide measurement ranges, Brooks delivers the performance and flexibility required for modern vacuum processes.
XacTorr® Heated Capacitance Manometers
- Available for process ranges from 0.10 Torr to 1000 Torr
- Multiple accuracy levels available
- Patented Mark IV sensor
- Digital architecture enables operation over a wide dynamic range with extremely good accuracy
- Dual-zone temperature control improves measurement stability and repeatability
- Multi-decade digital calibration provides superior window of known accuracy
- Intelli-touch zero adjustment
- Independent & easily accessible diagnostic service port
- DeviceNet® and analog communication options
- Lower drift, superior protection from deposition of process gases
- Elimination of manual potentiometers and drift associated with electronics
- Fast warm-up, close temperature control, rapid response to changes
- Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
- Cannot be zeroed if pressure is too high or desired temperature not reached
- Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting
Pressure Range: 0.1, 1, 2, 10, 20, 100, 1000 Torr (mBar & Pascal References Available)
Accuracy: 0.1, 1, 2, 10, 20, 100, 1000 Torr (mBar & Pascal References Available)
Connectivity: DeviceNet, RS485
Device Temperature: CMX0 Ambient, CMX1 45°C, CMX2 100°C, CMX3 160°C
Measuring Principle: Capacitance Diaphragm Gauge
CMC Unheated Capacitance Manometer
- Available for process ranges from 10 Torr to 1000 Torr
- Two accuracy levels available: 0.25% or 0.50% of reading (optional)
- Exceptional performance over a wide range of operating temperatures
- 40% smaller than traditional unheated capacitance manometers
- All-welded construction and Inconel® wetted surfaces
- Optional high accuracy calibration matches the accuracy of more costly premium unheated manometers
- Best-in-class zero and span temperature coefficients
- Space-saving design helps fit device into tight machine spaces
- Optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses
Pressure Range: 10, 20, 50, 100 and 1000 Torr Full Scale
Accuracy: Type A = 0.25% of Reading, Type B = 0.50% of Reading
Connectivity: Analog (0-10 V)
Device Temperature: Ambient
Measuring Principle: Capacitance Diaphragm Gauge
VersaTorr BVT100 Vacuum Gauges
- Available in two models, BVT100 measures from atmosphere to 7.5 x 10-7 while BVT125 includes an atmospheric switch.
- Ultra-wide measuring range of 9 decades
- Gas independent diaphragm sensor from 2 to 1333 mbar
- Ultra-Stable Zero-point drift compensation
- These vacuum gauges simplify system design, save space and costs by minimizing the need for multiple vacuum gauges and a separate atmospheric switch.
- Easy configuration via Brooks Vacuum Transducer Communicator USB programmer
- Advanced digital signal processing provides unmatched price performance ratio
- Optional solid state setpoint relay for process control
Pressure Range: 8e-7 to 1000 Torr
Accuracy: 7.5×10-5 to 7.49×10-3 Torr: ±5%, 7.5×10-3 to 7.49 Torr: ±0.5%, 7.50 to 7.49 Torr: ±0.5%, 75 Torr to 1000 Torr: ≤±0.5%
Connectivity: Analog (0–10 V), RS232, RS485
Device Temperature: Ambient – 50°C
Measuring Principle: Piezo
VersaTorr BVT200 Transducers
- Ultra-wide measuring range of 9 decades
- High accuracy across vacuum ranges
- Automatic zeroing of capacitance manometer
- Vacuum temperature sensor for diagnostics
- Capacitance diaphragm adds increased accuracy at 0.5% through low vacuum range
- Automatic zeroing of capacitance manometer
- Gas independent measurement, maintains accuracy even when gas composition changes
Pressure Range: 8e-7 to 1000 Torr
Accuracy: 7.5×10-5 to 7.49×10-3 Torr: ±5%, 7.5×10-3 to 7.49 Torr: ±0.5%, 7.50 to 7.49 Torr: ±0.5%, 75 Torr to 1000 Torr: ≤±0.5%
Connectivity: Analog (0–10 V), RS232, RS485
Device Temperature: Ambient – 50°C
Measuring Principle: Piezo, Capacitance Diaphragm Gauge