Thermal Mass Flow
| SLA5800 Series |
Models SLA5850 / SLA5860 / SLA5851 / SLA5861 / SLA5853 / SLA5863 The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology. Engineered with a superior design - and manufactured with advanced metrology and test systems - the SLA5800 offers a better zero drift specification than competitive products. SLA5800 series is now PROFINET enabled making it easier to network and deliver rich data to your PLC and DCS for enhanced process control. |
 |
Download |
| SLAMf Series |
Models SLAMf50 / SLAMf60 / SLAMf51 / SLAMf61 / SLAMf53 / SLAMf63 / SLAMf64 The SLAMf Series Elastomer Sealed Thermal Mass Flow Controllers & Meters available with the new POFINET offer Precision mass flow control. Hardened for the harshest environments the SLAMf Series flow controllers and meters deliver the precise accuracy and long-term stability. A specially engineered NEMA4X/IP66 enclosure protects the advanced digital electronics and ensures stable, accurate measurement and control of process-critical gas mass flows. |
 |
Download |
| Quantim® Series |
Models QMBC2 / QMBM2 / QMBC3 / QMBM3 / QMBC4 / QMBM4 The Quantim® Series Coriolis Mass Flow Controllers & Meters has a patented sensor design that measures low flows independent of the fluid type or process variable. Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis. |
 |
Download |
| GF40 Series |
Models GF40 The GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters with Brooks instrument exclusive MultiFlo™ technology. One device with multiple gases and flows equals maximum process flexibility and productivity. It’s the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. |
 |
Download |
| 58xxx & i Series |
Models 5850E, i / 5860E, i / 5851E, i / 5861E, i / 5853E, i / 5863E, i 58xxx & i Series Elastomer Sealed Thermal Mass Flow Controllers & Meters utilize a unique, extremely stable flow sensor to provide the reliable, accurate and repeatable measurement and control that today’s demanding industrial manufacturing processes require. |
 |
Download |
| 4800 Series |
Models 4850 / 4860 4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters. Ultra-fast response for time-critical flow processes. |
 |
Download |
| 5700 Series |
Models 5700 5700 Series Elastomer Sealed Mass Flow Meters. Cost-effective gas flow metering for targeted applications. Engineered specifically for the needs of purge gas, process analysis and analytical flow measurement: cost-effective and stable |
 |
Download |
| Power Supply 0251 / 0254 |
Models 0251 / 0254 The 0250 Series is an innovative, reliable microcomputer-based controller providing power for up to four Brooks Instrument thermal mass flow, Quantim Coriolis mass flow, and/or pressure devices. 0250 Series can be used to generate flow set point commands, display flow rate, totalize flow, provide blending multiple flow streams, and more. |
 |
Download |
| Power Supply 0260 Series |
0260 Series Power Supply, Smart Interface & Controller The 0260 Smart Interface is a Microsoft® Windows® based software application that provides expanded control and monitoring capabilities in laboratory and research environments for Brooks Instrument thermal mass flow meters and controllers with an RS485 Smart protocol digital interface. |
 |
Download |
| 5850EM Series |
Models 5850EM / 5851EM 5850EM Series Metal Sealed Thermal Mass Flow Controllers. Proven long-term stability. Ultra-pure performance for high pressure applications. 5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. |
 |
Download |
Enquire