GF Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

20/04/2020,

GF Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

The GF Series elastomer sealed mass flow controllers & meters allows you to have multiple gases in one device, meaning maximum process flexibility and productivity.

The GF Series with exclusive MultiFlo™ technology is the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. Enabling process flexibility combined with unprecedented flow measurement and control performance.

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Application

Features
  • Life sciences bioreactors
  • Vacuum processes
  • Nanotechnology/MEMS fabrication
  • Plasma, glass and web coating systems
  • Excellent option for manifold/gas delivery systems
  • Programmable multi-gas/multi-range capabilities
  • Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
  • Sub-1 second flow response time and accuracy of 1% set point for demanding applications
  • Well suited for a variety of gases
  • Fast response, Hastelloy sensor
  • Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface


Click here to view instrument data sheet